NGI Cleanrooms - High-energy EBL capability Summary: The Raith EBPG5200 is a dedicated system designed specifically for EBL with electron beam energy up to 100kV. The use of 100kV ensures that backscattered electrons remain mostly in the substrate and that the forwarding scattering angle is small, allowing for very narrow lines and dense arrays especially since proximity effects are also small at a high beam energy. Type: Other Owner: Faculty of Science and Engineering   Contact email: ngi-academic-enquiries@manchester.ac.uk Last modified: 23/06/2021 Link to this document: https://documents.manchester.ac.uk/display.aspx?DocID=55893 Edit (only Administrators)