NGI Cleanrooms - Wet chemistry

Summary: The term “wet chemistry” encompasses a large variety of processes based on liquid chemicals commonly used in semiconductor processing: from substrate cleaning and preparation to etching structures and dissolving resists for metal lift-off.

Type: Other

Owner: Faculty of Science and Engineering

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Contact email: ngi-academic-enquiries@manchester.ac.uk

Last modified: 23/02/2021

Link to this document:
https://documents.manchester.ac.uk/display.aspx?DocID=54320

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