NGI - inert gas facility

Summary: The inert gas facility has the capability to: exfoliate 2D crystals under an inert atmosphere; stack multiple crystals to make heterostructures; spin coat protective coatings and lithography resists; metallise using electron beam and thermal evaporation; etching and annealing of prepared substrates and samples in Ar, O2 and Ar:H2 atmospheres.

Type: Other

Owner: Faculty of Science and Engineering

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Contact email: ngi-academic-enquiries@manchester.ac.uk

Last modified: 10/02/2021

Link to this document:
https://documents.manchester.ac.uk/display.aspx?DocID=53147

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